Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
New page: Topographic measurements are measurements were you can measure hight differences on your substrate. If you measure in many spots of you substrate you can get a topographic image of your su... |
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|General description | |General description | ||
|Profiler for measuring micro structures | |||
|Profiler for measuring micro structures. Can do wafer mapping | |||
|AFM for measuring nanostructures and surface roughness | |||
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|Substrate size | |||
|4" or less | |||
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| | |6" or less | ||
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|Max. scan range xy | |Max. scan range xy | ||
| | |Line scan x: Full substrate size | ||
| | |Line scan x: Full substrate size | ||
| | |90 µm square | ||
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|Max. scan range z | |Max. scan range z | ||
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| | |1 µm (can go up to 5 µm under special settings) | ||
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|Resolution xy | |Resolution xy | ||
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|Max. aspect ratio | |Max. aspect ratio | ||
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|~1 with standard cantilever. | |||
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|Tip radius | |||
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|<12 nm on standard cantilever | |||
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