Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide: Difference between revisions

@@ Line 19: / Line 19: @@
 |style="background:WhiteSmoke; color:black"|Oxidation:
 *Dry
-*Wet: with bubbler (water steam + N<math>_2</math>)
+*Wet: with bubbler (water steam + N<sub>2</sub>)
 |-
 !style="background:silver; color:black" align="left"|Performance
@@ Line 38: / Line 38: @@
 |style="background:LightGrey; color:black"|Gas flows
 |style="background:WhiteSmoke; color:black"|
-*Annealing: N<math>_2</math>:5 sccm
+*Annealing: N<sub>2</sub>:5 sccm
-*Dry oxidation: O<math>_2</math>:5 sccm
+*Dry oxidation: O<sub>2</sub>:5 sccm
-*Wet oxidation: N<math>_2</math>:5 sccm
+*Wet oxidation: N<sub>2</sub>:5 sccm
 |-
 !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates