Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
Appearance
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|style="background:WhiteSmoke; color:black"|Oxidation: | |style="background:WhiteSmoke; color:black"|Oxidation: | ||
*Dry | *Dry | ||
*Wet: with torch (H< | *Wet: with torch (H<sub>2</sub>+O<sub>_2</sub>) | ||
|- | |- | ||
!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*O< | *O<sub>2</sub>,H<sub>_2</sub> and N<sub>_2</sub> | ||
|- | |- | ||
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates | !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates | ||