Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions
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===Process parameters for the acceptance test=== | ===Process parameters for the acceptance test=== | ||
To find the optimal parameters, Design of Experiments was applied, with the intervals shown on the figure below. | To find the optimal parameters, Design of Experiments was applied, with the intervals shown on the figure below. | ||
{| border="2" cellspacing="2" cellpadding="3" | {| align=left border="2" cellspacing="2" cellpadding="3" | ||
!Parameter | !Parameter | ||
!Ti etch acceptance | !Ti etch acceptance | ||