Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions
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|} | |}[[image:KHARA-MLS-DoE.png|400x400px|thumb|center|DoE for MLS etch]] | ||
[[image:KHARA-MLS-DoE.png| | |||
===Some SEM profile images of the etched stacks=== | ===Some SEM profile images of the etched stacks=== | ||