Specific Process Knowledge/Characterization/Profiler: Difference between revisions
Appearance
No edit summary |
|||
| Line 36: | Line 36: | ||
|style="background:LightGrey; color:black"|Resolution z | |style="background:LightGrey; color:black"|Resolution z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1Å, 10Å, | 1Å, 10Å, 80Å or 160Å (for ranges 65kÅ, 655 kÅ, 5240 kÅ and 1mm respectively) | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
| Line 60: | Line 60: | ||
|- | |- | ||
|} | |} | ||
==Dektak 8 stylus profiler== | ==Dektak 8 stylus profiler== | ||