Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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Topographic measurements are measurements were you can measure hight differences on your substrate. If you measure in many spots of the substrate you can get a topographic image of the substrate. | Topographic measurements are measurements were you can measure hight differences on your substrate. If you measure in many spots of the substrate you can get a topographic image of the substrate. | ||
AT DANCHIP we have | AT DANCHIP we have four systems for topographic measurement: | ||
*Dektak - ''Profiler for measuring micro structures'' | *Dektak (there are two systems) - ''Profiler for measuring micro structures'' | ||
*Optical Profiler (Sensofar) - ''3D Profiler for measuring micro structures'' | *Optical Profiler (Sensofar) - ''3D Profiler for measuring micro structures'' | ||
*Nanoman - ''AFM for measuring nano structures'' | *Nanoman - ''AFM for measuring nano structures'' | ||