Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions
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==Results of Design of Experiments optimization of magnetic stack etching== | ==Results of Design of Experiments optimization of magnetic stack etching== | ||
===Process parameters for the acceptance test=== | |||
{| border="2" cellspacing="2" cellpadding="3" | {| border="2" cellspacing="2" cellpadding="3" | ||
!Parameter | !Parameter | ||