Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
| Line 70: | Line 70: | ||
*Silicon Oxynitride | *Silicon Oxynitride | ||
*Photoresist | *Photoresist | ||
*Blue film | |||
*Gold (Au) and Nickel (Ni) (but only in BHF2 (KOH)!) | |||
| | | | ||
*Silicon | *Silicon | ||