Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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| ||||Pillar heights of 69 µm with 25 µm between pillar edges|| | | ||||Pillar heights of 69 µm with 25 µm between pillar edges|| | ||
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| 7||Free standing structure||Measure bow due to stress of a membrane.||Membrane bow repeatability of 5 successive measurement within 2% | | [[#Results of acceptance test no. 7|7]]||Free standing structure||Measure bow due to stress of a membrane.||Membrane bow repeatability of 5 successive measurement within 2% | ||
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| ||||Membrane material: Si(2 µm)/SiO2(~1 µm)/Au(50 nm).|| | | ||||Membrane material: Si(2 µm)/SiO2(~1 µm)/Au(50 nm).|| | ||