Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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| ||||Trench depth with aspect ratio 1:13 on a 6.4 µm wide trench|| | | ||||Trench depth with aspect ratio 1:13 on a 6.4 µm wide trench|| | ||
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| 4||Patterned flat sample of glass||3D profile of pattern etched down in a quartz sample.||Depth within ±1% from a standard profiler measurement and repeatability (3 successive measurements) within 0.1% | | [[#Results_of_acceptance_test_no._4|4]]||Patterned flat sample of glass||3D profile of pattern etched down in a quartz sample.||Depth within ±1% from a standard profiler measurement and repeatability (3 successive measurements) within 0.1% | ||
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| ||||Pattern size 20 µm x 20 µm, depth 500 nm|| | | ||||Pattern size 20 µm x 20 µm, depth 500 nm|| | ||