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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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Acceptance criteria: Repeatability within 0.2%
Acceptance criteria: Repeatability within 0.2%
Note: Because the surface roughness of the sample was very low and the noise/vibration level too high we could not obtain the specified repeatibility.






'''Result'''
'''Result'''
5% ~0.3Å repeatability.
*The surface roughness (Ra) was 0.5nm
*The repeatebility over 10 measurements was 34%
*The maximum deviation in roughness was 0.2nm
 
Se the number in the file below:
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