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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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Measurement: Roughness repeatability, 3 successive measurements of the roughness  
Measurement: Roughness repeatability, 3 successive measurements of the roughness  
Acceptance criteria: Repeatability within 0.2%




Acceptance criteria: Repeatability within 0.2%
'''Result'''
5% ~0.3Å repeatability.
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