Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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==Results of acceptance test no. 12== | ==Results of acceptance test no. 12== | ||
Sample: Si with 1. | Sample: Si with 1.4 µm patterned AZ-resist on 50µm pillars | ||
Measurement:Film thickness measurements of transparent films on small structure | Measurement:Film thickness measurements of transparent films on small structure | ||
Acceptance criteria:Within ±1% from a standard profiler measurement. | Acceptance criteria:Within ±1% from a standard profiler measurement. | ||
'''Settings''' | |||
Used Models -> Others -> Cauchy | |||
Options -> Roughness -> change amplitude fitting | |||
'''Result''' | |||
==Results of acceptance test no. 13== | ==Results of acceptance test no. 13== | ||