Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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'''Settings''' | '''Settings''' | ||
Objective: EPI 20x-N | |||
*Objective: EPI 20x-N | |||
*Model: SiO2 thermal | |||
'''Result''' | '''Result''' | ||
The result was 28.7nm | The result was 28.7nm | ||