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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

BGE (talk | contribs)
BGE (talk | contribs)
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'''Settings'''
'''Settings'''
Objective: EPI 20x-N
 
*Objective: EPI 20x-N
*Model: SiO2 thermal






'''Result'''
'''Result'''
The result was 28.7nm
The result was 28.7nm