Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
| Line 269: | Line 269: | ||
*Extended topography | *Extended topography | ||
*Objective: DI 20x-N | *Objective: DI 20x-N | ||
Z scan: VSI: 40µm | *Z scan: VSI: 40µm | ||
Threshold: 1.0% | *Threshold: 1.0% | ||
==Results of acceptance test no. 9== | ==Results of acceptance test no. 9== | ||