Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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Acceptance criteria: Membrane bow must the same as on 7 within 2% | Acceptance criteria: Membrane bow must the same as on 7 within 2% | ||
'''Settings:''' | |||
*Extended topography | |||
*Objective: DI 20x-N | |||
Z scan: VSI: 40µm | |||
Threshold: 1.0% | |||
==Results of acceptance test no. 9== | ==Results of acceptance test no. 9== | ||