Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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|Size of substrate | |Size of substrate | ||
|4" and 6" in our standard bath | | | ||
*4" and 6" in our standard bath | |||
*4", 2" in "Fumehood KOH" | |||
|4" in our standard bath | |4" in our standard bath | ||
|4" (or smaller with carrier) | |4" (or smaller with carrier) | ||
|6" (when it is set up for 6") and 4" (or smaller if you have a carrier) | |6" (when it is set up for 6") and 4" (or smaller if you have a carrier) | ||
|- | |- | ||
| | |Batch size | ||
|25 wafers at a time | | | ||
*25 wafers at a time | |||
*1-5 wafers in "Fumehood KOH" | |||
|25 wafers at a time | |25 wafers at a time | ||
|One wafer at a time | |One wafer at a time | ||