Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

Revision as of 08:57, 27 August 2012 view source BGE (talk \| contribs) Bureaucrats, danchip, Administrators 2,908 edits →Results of acceptance test no. 7 ← Older edit		Revision as of 08:57, 27 August 2012 view source BGE (talk \| contribs) Bureaucrats, danchip, Administrators 2,908 edits →Results of acceptance test no. 7 Newer edit →
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	Sample: Free standing structure. Membrane material: Si(2 µm)/SiO2(~1 µm)/Au(50 nm). Membrane size: honey comb structure approximately 150 µm in diameter		Sample: Free standing structure. Membrane material: Si(2 µm)/SiO2(~1 µm)/Au(50 nm). Membrane size: honey comb structure approximately 150 µm in diameter


	Measure: Measure bow due to stress of a membrane.		Measure: Measure bow due to stress of a membrane.