Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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*VSI Z scan 18.0µm | *VSI Z scan 18.0µm | ||
*Threshold 2% | *Threshold 2% | ||
*Note: Scan only in the APOX (not in the Si) or else the system will get confused | |||
'''See the result here:''' | '''See the result here:''' | ||