Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
Appearance
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'''Settings:''' | '''Settings:''' | ||
Recipe: Appeptance nr. 5 SMR | *Recipe: Appeptance nr. 5 SMR | ||
Mode: default | *Mode: default | ||
Objective: 50x-DI | *Objective: 50x-DI | ||
VSI Z scan 18.0µm | *VSI Z scan 18.0µm | ||
Threshold 2% | *Threshold 2% | ||
'''See the result here:''' | '''See the result here:''' | ||