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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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==Results==
 
===Results of acceptance test no. 1, 2 and 3===
==Results of acceptance test no. 1, 2 and 3==
Sample material: Patterned silicon substrate
Sample material: Patterned silicon substrate
Measurement: Trench depth with aspect ratio 1:10, 1:11 and 1:13 on a 10µm, 8mm and 6.4µm wide trenches respectively
Measurement: Trench depth with aspect ratio 1:10, 1:11 and 1:13 on a 10µm, 8mm and 6.4µm wide trenches respectively
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===Results of acceptance test no. 4===
==Results of acceptance test no. 4==
Sample material: Patterned fused silica.  
Sample material: Patterned fused silica.  


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===Results of acceptance test no. 5===
==Results of acceptance test no. 5==
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