Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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Acceptance criteria:Depth 100±2 µm, 91±2µm and 85±2µm | Acceptance criteria:Depth 100±2 µm, 91±2µm and 85±2µm | ||
Test no. 1 was done in two ways: | |||
#With confocal objective EPI 100x-N: [[Media:Sensofar_A1_100XEPI_with_fine_shift_dual_light_900_60.pdf|See the results here]] | #With confocal objective EPI 100x-N: [[Media:Sensofar_A1_100XEPI_with_fine_shift_dual_light_900_60.pdf|See the results here]] | ||
#With Interferometric objective 50X DI: [[Media: Sensofar_A1_vsi_50xDI_SNR_with_increased_gain_and_contrast.pdf|See the results here | #With Interferometric objective 50X DI: [[Media: Sensofar_A1_vsi_50xDI_SNR_with_increased_gain_and_contrast.pdf|See the results here | ||
]] | ]] | ||
====Setting for methode no. 1: confocal==== | Test no. 2 was done using: confocal objective EPI 100x-N: [[Media:Sensofar_A2_100XEPI_with_fine_shift_dual_light_900_60.pdf|See the results here]] | ||
Test no. 3 was done using: confocal objective EPI 100x-N: [[Media:Sensofar_A3_100XEPI_with_fine_shift_dual_light_900_60.pdf|See the results here]] | |||
====Setting for methode no. 1 for test no. 1,2 and 3: confocal==== | |||
Recipe: Trench | Recipe: Trench | ||
*Operation mode: trench | *Operation mode: trench | ||
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***Gain: default | ***Gain: default | ||
====Setting for methode no. 2: interferometric==== | ====Setting for methode no. 2 for test no. 1: interferometric==== | ||
We do not have a recipe for that but we used: | We do not have a recipe for that but we used: | ||
*Objective: Interferometric 50x DI | *Objective: Interferometric 50x DI | ||