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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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Bureaucrats, danchip, Administrators
2,908 edits
BGE (talk | contribs)
Bureaucrats, danchip, Administrators
2,908 edits
Line 84: Line 84:
**Dual - bottom up
**Dual - bottom up
***top: 8µm
***top: 8µm
***Gap: 91µm
***Gap: 91µm (the trench depth)
***Bottom: 8µm
***Bottom: 8µm
**Speed factor: 1x
**Speed factor: 1x
Line 91: Line 91:
*Light source
*Light source
**Levels: 2
**Levels: 2
***900 -> 60
***900 -> 60 (might need to be set a little different)
***Gain: default
***Gain: default


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