Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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VSI z scan: 10µm | VSI z scan: 10µm | ||
Treshold: 1% | Treshold: 1% | ||
'''Results:''' | |||
It was repeated 10 Time | |||
The first measurement is shown here: | |||