Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
| Line 105: | Line 105: | ||
Measurement: Depth of pattern | Measurement: Depth of pattern | ||
Acceptance criteria:Depth within ±1% from a standard profiler measurement and repeatability (3 successive measurements) within 0.1% | Acceptance criteria:Depth within ±1% from a standard profiler measurement and repeatability (3 successive measurements) within 0.1% | ||
Standard profiler measurement: | Standard profiler measurement: | ||