Specific Process Knowledge/Thin film deposition/Si sputter in Wordentec: Difference between revisions

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New page: == Silicon sputter== Silicon can be deposited in Wordentec. '''Parameters''' Listed below are tried parameters, that can ...
 
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Listed below are tried parameters, that can be used during deposition.
Listed below are tried parameters, that can be used during deposition.


Please don´t use higher power then 180W, since the target then could breake into a lot of small pieces.


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Revision as of 13:11, 15 August 2012

Silicon sputter

Silicon can be deposited in Wordentec.


Parameters

Listed below are tried parameters, that can be used during deposition.


Please don´t use higher power then 180W, since the target then could breake into a lot of small pieces.

Setting
Process type Sputtering
Power 1000W
Base pressure 6*10-7
Ignition pressure 6*10-3
Sputter pressure 4*10-3
Rate About 0,14Å/s (2 wafers plates, rotating)