Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus methods, roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution. | The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus methods, roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution. | ||
===Process examples=== | |||
*[[/Optical Profiler (Sensofar) acceptance test|Results from the Optical Profiler (Sensofar) acceptance test]] | |||