Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300: Difference between revisions
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==Process information== | ==Process information== | ||
===Etch=== | ===Etch=== | ||
*[[/IBE process trends|Some general process trends]] | |||
*Results from the acceptance test: | *Results from the acceptance test: | ||
**[[/IBE Au etch|Au etch with zep520A as masking material]] | **[[/IBE Au etch|Au etch with zep520A as masking material]] | ||