Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
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== Development of switched nanoetch process == | == Development of switched nanoetch process == | ||
On the basis of the pxnano2 recipe from the ASE we will try to make a similar Bosch process on the Pegasus. | On the basis of the pxnano2 recipe from the ASE we will try to make a similar Bosch process on the Pegasus. The substrates are 6" wafers with | ||
{| border="1" cellspacing="1" cellpadding="1" style="text-align:center;" | {| border="1" cellspacing="1" cellpadding="1" style="text-align:center;" | ||