Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

On the basis of the pxnano2 recipe from the ASE we will try to make a similar Bosch process on the Pegasus.  

!Recipe

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!C₄F₈ (sccm)

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!SF₆ (sccm)

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!O₂ (sccm)

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! Coil power (W)

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!Platen power (W)

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! Pressure (mtorr)

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! Temperature (degs C)

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! colspan="10" align="center"| Etch rates (nm/min)