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Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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PLu Neox 3D Optical Profiler (from Sensofar)has a dual-technology sensor head that combines confocal and interferometry techniques as well as thick and thin film measurement capabilities.
PLu Neox 3D Optical Profiler (from Sensofar)has a dual-technology sensor head that combines confocal and interferometry techniques as well as thick and thin film measurement capabilities.


The neox sensor head provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument.
The Neox sensor head provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument.


The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.
The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.
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