Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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[[image:Prism_coupler.jpg|300x300px|right|thumb|Prism coupler: positioned in cleanroom 2]] | [[image:Prism_coupler.jpg|300x300px|right|thumb|Prism coupler: positioned in cleanroom 2]] | ||
The Prism coupler is a Metricon model 2010 Prism Coupler. It is an old system from 1991 but the system with a few modifications is still beening manufactured today. It is still a very easy and relaible method of determining thickness and refractive index. | The Prism coupler is a Metricon model 2010 Prism Coupler. It is an old system from 1991 but the system with a few modifications is still beening manufactured today. It is still a very easy and relaible method of determining thickness and refractive index. | ||
The prism coupler uses an optical waveguide technique to determine the thickness and refractive index of a thin film. To learn more about the theory of measurement please see the homepage of [http://www.metricon.com/ | The prism coupler uses an optical waveguide technique to determine the thickness and refractive index of a thin film. To learn more about the theory of measurement please see the homepage of [http://www.metricon.com/] | ||
It is especially good for making fast accurate measurements of dielectric thin films with n<2.02 and a thickness range of 1 µm to about 15 µm. | It is especially good for making fast accurate measurements of dielectric thin films with n<2.02 and a thickness range of 1 µm to about 15 µm. | ||