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=== [[Specific Process Knowledge/Characterization/Profiler#Optical_Profiler_(Sensofar)|The optical profiler (Sensofar)]] ===
=== [[Specific Process Knowledge/Characterization/Profiler#Optical_Profiler_(Sensofar)|The optical profiler (Sensofar)]] ===
The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument.
The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.


=== The scanning electron microscopes ===
=== The scanning electron microscopes ===
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