Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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|'''Max. scan range z'''

|50Å to 262µm  

|1 µm (can go up to 5 µm under special settings)

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|'''Resolution xy'''

|down to 0.067 µm

|Depending on scan size and number of samples per line and number of lines - accuracy better than 2%

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|'''Resolution z'''

|1Å, 10Å or 20Å

|<1Å - accuracy better than 2%

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|'''Max. scan depth [µm] (as a function of trench width W''')

|1.2(W[µm]-5µm)

|~1 with standard cantilever.

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|'''Tip radius'''

|5 µm 45^o cone

|<12 nm on standard cantilever

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|'''Stress measurement'''

|Can be done

|Cannot be done

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|'''Surface roughness'''

|Can be done on a line scan

|Can be done on a selected surface area  

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