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| Line 99: |
Line 99: |
| *see here the performance of the different objectives: [[image:Optical_Profiler_Table_2.jpg|27x27px|center|thumb]] | | *see here the performance of the different objectives: [[image:Optical_Profiler_Table_2.jpg|27x27px|center|thumb]] |
| |- | | |- |
| |style="background:silver; color:black"|
| |
| |style="background:LightGrey; color:black"|Scan range z
| |
| |style="background:WhiteSmoke; color:black"|
| |
| 50 Å to 1 mm
| |
| |-
| |
| |style="background:silver; color:black"|
| |
| |style="background:LightGrey; color:black"|Resolution xy
| |
| |style="background:WhiteSmoke; color:black"|
| |
| down to 0.067 µm
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| |-
| |
| |style="background:silver; color:black"|
| |
| |style="background:LightGrey; color:black"|Resolution z
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| |style="background:WhiteSmoke; color:black"|
| |
| 1Å, 10Å, 40Å or 160Å (for ranges 65kÅ, 655 kÅ, 2620 kÅ and 1mm respectively)
| |
| |-
| |
| |style="background:silver; color:black"|
| |
| |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
| |
| |style="background:WhiteSmoke; color:black"|
| |
| 1.2(W[µm]-5µm)
| |
| |-
| |
| |-
| |
| !style="background:silver; color:black" align="left"|Hardware settings
| |
| |style="background:LightGrey; color:black"|Tip radius
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *5 µm 45<sup>o</sup> cone
| |
| |- | | |- |
| !style="background:silver; color:black" align="left"|Substrates | | !style="background:silver; color:black" align="left"|Substrates |
| |style="background:LightGrey; color:black"|Substrate size | | |style="background:LightGrey; color:black"|Substrate size |
| |style="background:WhiteSmoke; color:black"| | | |style="background:WhiteSmoke; color:black"| |
| *up to 8" | | *up to more than 6" |
| |- | | |- |
| |style="background:silver; color:black"| | | |style="background:silver; color:black"| |
