Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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==Optical Profiler (Sensofar)== | ==Optical Profiler (Sensofar)== | ||
[[image:Optical_Profiler_1.JPG|275x275px|right|thumb|Dektak8: positioned in cleanroom 4 - glass cage no. 3]] | |||
PLu Neox 3D Optical Profiler (from Sensofar)has a dual-technology sensor head that combines confocal and interferometry techniques as well as thick and thin film measurement capabilities. | PLu Neox 3D Optical Profiler (from Sensofar)has a dual-technology sensor head that combines confocal and interferometry techniques as well as thick and thin film measurement capabilities. | ||