Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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==Optical Profiler (Sensofar)== | ==Optical Profiler (Sensofar)== | ||
PLu Neox 3D Optical Profiler (from Sensofar)has a dual-technology sensor head that combines confocal and interferometry techniques as well as thick and thin film measurement capabilities. | |||
The neox sensor head provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. | |||
The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | |||
==Comparing the profilers== | ==Comparing the profilers== | ||
Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | ||