Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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==Oxidation curves== | ==Oxidation curves== | ||
===Generic calculator for wet/dry oxide thickness calculation=== | |||
The following links give an approximate oxide time/thickness based on a general formula. | |||
* [http://www.cleanroom.byu.edu/OxideTimeCalc.phtml Know thickness - want time] | |||
* [http://www.cleanroom.byu.edu/OxideThickCalc.phtml Know time - want thickness] | |||
The curves below are based on measurements in our specific furnaces and give more accurate results. | |||
===A1 Furnace <100>-Si Wet Oxidation=== | ===A1 Furnace <100>-Si Wet Oxidation=== | ||