Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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| set\microrea\feicy3 | | set\microrea\feicy3 | ||
| 1.5 | | 1.5 µm PR | ||
| CYTOP | | CYTOP | ||
| 5 | | 5 | ||
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| 600 | | 600 | ||
| 150 | | 150 | ||
| | | Estimated etch rate ~1.3um/min, selectivity around 1:8, etch load app. 10% | ||
|- | |- | ||
|} | |} | ||