Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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|+ '''Recipe''' | |+ '''Recipe''' | ||
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! rowspan="2" align="center"| | ! rowspan="2" align="center"| Folder\name | ||
! colspan="2" align="center"| Materials | ! colspan="2" align="center"| Materials | ||
! colspan="8" align="center"| Process parameters | ! colspan="8" align="center"| Process parameters | ||
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! | ! | ||
| | | set\microrea\feicy3 | ||
| CYTOP | | CYTOP | ||
| 5 | | 5 | ||