Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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! Pressure (mTorr) | ! Pressure (mTorr) | ||
| | | 2, Strike 3 secs @ 15 mTorr??? | ||
| 1 | | 1 | ||
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| Line 41: | Line 41: | ||
|- | |- | ||
! Pressure (mTorr) | ! Pressure (mTorr) | ||
| | | 2, Strike 3 secs @ 15 mTorr??? | ||
| 1 | | 1 | ||
|- | |- | ||