Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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image:SIMScascade.gif|A beam of high energy ions is rastered on the surface of the sample. Some of the atoms that used to make up the surface are sputtered off and emitted as secondary ions. The mass of the these ions is measured with a mass spectrometer. | image:SIMScascade.gif|A beam of high energy ions is rastered on the surface of the sample. Some of the atoms that used to make up the surface are sputtered off and emitted as secondary ions. The mass of the these ions is measured with a mass spectrometer. | ||
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XPS_electron_levels.pdf | |||
== Secondary Ion Mass Spectrometry == | == Secondary Ion Mass Spectrometry == | ||