Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS. | These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS. | ||
== X-ray Photoelectron Spectroscopy analysis == | |||
During a XPS (X-ray Photoelectron Spectroscopy) analysis, the sample is irradiated with photons of a specific energy (in the Danchip system 1486 eV). When energy of the irradiating X-rays is adsorbed by the atoms in the sample, photoelectrons are edjected [[http://en.wikipedia.org/wiki/Photoelectric_effect]]. | |||
Since the energy of the incomming photons is known, and the energy of the edjected electrons is measured, the binding energy of the electrons in the probed atoms can be known. The binding energy of the electrons are element specific, and is therefore a "finger-print" of the atom. | |||
A measurment of the XPS spectrum gives therefore information of which materials, and at which concentrations, are present in the sample. | |||
The binding eneryg of lower lying atomic levels (for example 1s, 2s and 2p) are at a specific energy, but is slightly affected by the | |||
== Comparison of EDX, SIMS and XPS == | == Comparison of EDX, SIMS and XPS == | ||