Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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** It not as sensitive as the SIMS, but faster, so it can be an alternative if you are checking for higher contamination levels (like 1 %) | ** It not as sensitive as the SIMS, but faster, so it can be an alternative if you are checking for higher contamination levels (like 1 %) | ||
* Do a analysis of the chemical state of atoms present on the surface. | * Do a analysis of the chemical state of atoms present on the surface. | ||
** See what effect | ** See what effect a surface treatment of your sample has on the surface chemistry. | ||
** Check a polymer covered surface. Are for example (C=O), (C-OH) (C-C) groups present in the polymer after it been deposited on a surface. | ** Check a polymer covered surface. Are for example (C=O), (C-OH) (C-C) groups present in the polymer after it been deposited on a surface. | ||