Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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|| Every element heavier than boron/carbon | || Every element heavier than boron/carbon | ||
|| Every element | || Every element | ||
|| Every element except hydrogen and helium. However, the signal from two substances can overlapp, which can reduce the detection limit | |||
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! Chemical information | ! Chemical information | ||
|| None: Only transistions involving inner shell electrons are detected | || None: Only transistions involving inner shell electrons are detected | ||
|| None | || None | ||
|| Chemical state information | |||
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! Sample limitations | ! Sample limitations | ||
|| Vacuum compatible. | || Vacuum compatible. | ||
|| Vacuum compatible. The sample needs to be cut into small (app. 5*5 mm) pieces. | || Vacuum compatible. The sample needs to be cut into small (app. 5*5 mm) pieces. | ||
|| Vacuum compatible. | |||
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! Spatial resolution | ! Spatial resolution | ||
|| Very precise point-like analysis is possible with SEM electron beam. | || Very precise point-like analysis is possible with SEM electron beam. | ||
|| Limited to what is visible in a camera | |||
|| Limited to what is visible in a camera | || Limited to what is visible in a camera | ||
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