Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

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 These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS.
-== Comparison of EDX and SIMS ==
+== Comparison of EDX, SIMS and XPS ==
 {| border="1" cellspacing="0" cellpadding="4" align="center"
 !width="100"|
-!width="300" | SEM with EDX
+!width="250" | SEM with EDX
-!width="300" | SIMS
+!width="250" | SIMS
+!width="250" | XPS
 |-
 ! Full name
 || Energy Dispersive X-ray Analysis
 || Secondary Ion Mass Spectroscopy
+|| X-ray Photoelectron Spectroscopy
 |-
 !  Technique
 || Non destructive method: X-rays are generated when the primary beam impinges on the sample. The elemental analysis is possible because the energy of these X-rays is characteristic of the element they emitted from.
 || Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer.
+|| Non destrucive method: X-rays are irridiating the sample, and the energy of edjected photoelectrons is measured. The elemental analysis is possible, since the binding energy of the electrons (and hence the energy of the emitted photoelectrons) are specific for each element.
 |-
 !  What elements are detected