Specific Process Knowledge/Characterization/XPS: Difference between revisions
No edit summary |
|||
| Line 33: | Line 33: | ||
Here is shown a spectrum measured over the energy range 0-1350 eV, and characteristic lines from three elements (C,O and Si) are seen and indicated in the spectrum. | Here is shown a spectrum measured over the energy range 0-1350 eV, and characteristic lines from three elements (C,O and Si) are seen and indicated in the spectrum. | ||
The instrument program can use this information to give an estimate of the sample composition, giving the atomic | The instrument program can use this information to give an estimate of the sample composition, giving the atomic percentage of the different elements. | ||
===Chemical state=== | ===Chemical state=== | ||