Specific Process Knowledge/Characterization/XPS: Difference between revisions

@@ Line 29: / Line 29: @@
-Each element give a specific "finger-print" in the XPS spectrum. The electrons in the atoms have different binding energies for all elements, and when measuring a photoelectron spectrum over a wide range of energies, the main line from each element will be placed at a specific energy in the spectra.
+Each element give a specific "finger-print" in the XPS spectrum. The binding energy of the electrons in atoms are different for all elements, and when measuring a photoelectron spectrum over a wide range of energies, the main line from each element will be placed at a specific energy in the spectrum.
-Here is shown a spectra measured over the energy range 0-1350 eV, and characteristic lines from three elements (C,O and Si) are seen and indicated in the spectrum.
-The instrument program can use this information to give an estimate of the sample composition, giving the atomic procentage of the different elements.
+Here is shown a spectrum measured over the energy range 0-1350 eV, and characteristic lines from three elements (C,O and Si) are seen and indicated in the spectrum.
+The instrument program can use this information to give an estimate of the sample composition, giving the atomic procentage of the different elements.
 ===Chemical state===