Specific Process Knowledge/Characterization/XPS: Difference between revisions
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[[image:Si2p.JPG|420x420px|left|thumb|XPS Si2p spectrum of Si sample]] | [[image:Si2p.JPG|420x420px|left|thumb|XPS Si2p spectrum of Si sample]] | ||
Due to the so called Chemical shift, it is possible to get information about the chemical state of the probed atoms. | |||
The core electrons of the atoms are affected, meaning that the binding energy of the electrons are slightly shifted, when an atom is bonded to atoms of other elements. | |||